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Tool Order: Major European IDM purchases Tegal etchers for high-k applications |
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May 29, 2007 at 05:25 PM |
 A major European IDM has placed a multiple tool order with Tegal for its 6540 advanced plasma etch systems. The three tools ordered will be used in applications that enable the production of high-k, de-coupling capacitors incorporated into cell phones and other wireless devices, Tegal said. Tool installation is expected over the next few months.
"We achieved this sale based on being able to deliver unique process technology, continuously improving our process and hardware in a high volume manufacturing environment, and maintaining a company-wide commitment to the success of this project for our customer," said Thomas Mika, President and CEO of Tegal.
"Tegal has developed significant, patented technology, along with unique process know-how in the area of high-k dielectrics and non-volatile metals," said Vahan Tchakerian, Tegal's Vice President of Global Sales. "Such materials are increasingly important for meeting the size, integration and power requirements of devices incorporated into a wide range of wireless products."
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