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New Product: IDE upgrades EMI cancellation system for sensitive tools

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IDEProduct Briefing Outline: Integrated Dynamics Engineering (IDE) has made significant upgrades to its popular EMI cancellation system for electron beam microscopes, MRI and lithography equipment. The MK 4 version now has state-of-the-art design enhancements to its active, analog and digital controls with improved DC and AC disturbance safeguards. A new patent-pending control system employs both analog controls to manage high frequencies and digital controls to handle the more complex quasi-DC rejection needs, while providing for operator interaction.

Problem: The disturbances countermanded by the MK 4 are usually environmental or structure-borne, invading the space where sensitive instruments operate, such as MRI facilities, semiconductor manufacturing sites, and electron beam microscopy laboratories.

Solution: The quasi-DC disturbances that the IDE MK 4 system effectively blocks are typically rated below 15Hz and are generated by the motion of large ferromagnetic objects nearby, such as elevators, surface and subway trains, trucks, automobiles and aircraft traffic.  The AC disturbances attenuated by IDE's MK 4 EMI Cancellation System vary in a periodic or cyclical manner and emanate, for example, from electric power stations, transformers, and transmission lines where energy is highly concentrated.
Other disturbances controlled by the MK 4 are often less powerful but potentially damaging to sensitive instruments, coming from nearby computer equipment generating magnetic fields, security control devices, and banks of testing and manufacturing equipment elsewhere in a facility. The MK 4 attenuates all EMI within an unprecedented frequency range from DC to 10 kHz.

Applications: SensitIve fab equipment such as electron beam microscopes and lithography tools.

Platform: The MK 4 EMI Cancellation System is designed around an IDE custom-configured Helmholtz Cage and IDE's unique feedback control engineering. Sensors are placed near the equipment to be protected. A signal is fed through the proprietary IDE MK 4 controller to a compensation coil, producing precisely calibrated electro-magnetic fields. These compensation fields create a minimized effective field at the sensor site, virtually neutralizing the original disturbance, and optimizing the overall operation of the sensitive equipment, according to the company.

Availability: May 2007 onwards.

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