Product Briefing Outline: Integrated Dynamics
Engineering (IDE) has made significant upgrades to its popular EMI
cancellation system for electron beam microscopes, MRI and lithography
equipment. The MK 4 version now has state-of-the-art design
enhancements to its active, analog and digital controls with improved
DC and AC disturbance safeguards. A new patent-pending control system
employs both analog controls to manage high frequencies and digital
controls to handle the more complex quasi-DC rejection needs, while
providing for operator interaction.
Problem: The disturbances countermanded by the MK 4
are usually environmental or structure-borne, invading the space where
sensitive instruments operate, such as MRI facilities, semiconductor
manufacturing sites, and electron beam microscopy laboratories.
Solution:
The quasi-DC disturbances that the IDE MK 4 system effectively blocks
are typically rated below 15Hz and are generated by the motion of large
ferromagnetic objects nearby, such as elevators, surface and subway
trains, trucks, automobiles and aircraft traffic. The AC disturbances
attenuated by IDE's MK 4 EMI Cancellation System vary in a periodic or
cyclical manner and emanate, for example, from electric power stations,
transformers, and transmission lines where energy is highly
concentrated.
Other disturbances controlled by the MK 4 are often
less powerful but potentially damaging to sensitive instruments, coming
from nearby computer equipment generating magnetic fields, security
control devices, and banks of testing and manufacturing equipment
elsewhere in a facility. The MK 4 attenuates all EMI within an
unprecedented frequency range from DC to 10 kHz.
Applications: SensitIve fab equipment such as electron beam microscopes and lithography tools.
Platform:
The MK 4 EMI Cancellation System is designed around an IDE
custom-configured Helmholtz Cage and IDE's unique feedback control
engineering. Sensors are placed near the equipment to be protected. A
signal is fed through the proprietary IDE MK 4 controller to a
compensation coil, producing precisely calibrated electro-magnetic
fields. These compensation fields create a minimized effective field at
the sensor site, virtually neutralizing the original disturbance, and
optimizing the overall operation of the sensitive equipment, according
to the company.
Availability: May 2007 onwards.