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Home arrow Cleanroom arrow Edition 10 arrow 10th Edition: Energy Efficiency Opportunities in Silicon Ingot Manufacturing
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10th Edition: Energy Efficiency Opportunities in Silicon Ingot Manufacturing Print E-mail
Jun 03, 1999 at 09:06 AM
Bryan Fickett, Greg Mihalik, Siemens Solar, Vancouver, WA, USA


ABSTRACT

Energy and argon are two costly components used in the Czochralski (CZ) growth of silicon ingot. Siemens Solar Industries (SSI), in cooperation with the Northwest Energy Efficiency Alliance (NEEA), are developing a method which significantly reduces consumption of these costly resources. A discrete finite element package was used to model CZ growth conditions on a Kayex CG6000 crystal growth furnace. Based on these simulations an energy efficient hotzone was designed and assembled. The modifications resulted in substantial reductions in energy and argon, as well as improvements in productivity, yield, and ingot characteristics.

10th Edition: Energy Efficiency Opportunities in Silicon Ingot Manufacturing
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