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The real IBM airgap process revealed! |
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May 09, 2007 at 09:09 PM |
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We can all now forget that over-hyped press release from IBM regarding seashells and the like, as the team over at SST Magazine got an exclusive chat with IBM's process guru and IBM fellow Dan Edelstein. Congrats guys!
In Ed's blog Dan details the important basics of the complete process to create what turns out to be large airgaps rather than a porous low-k technology I thought it was referring to! One note worth mentioning here is the fact that the self-assembly aspect doesn't have to be used in for all the applicable layers as a standard litho step can do exactly the same job and is cheaper for some layers as it uses a standard photoresist! It's still a breakthrough of kinds with the integration of a diblock polymer process for a few layers, but no where near the significance IBM originally touted. Now who would have guessed at such a thing? The SST/ Ed Korczynski blog with the IBM interview can be viewed here; (http://www.pennwellblogs.com/sst/eds_threads/)
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