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10th Edition:Fab Design and Development Methodology Must Change to Allow for Successful Integration |
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Jun 03, 2005 at 05:44 PM |
THERON D. COLVIN, PRI Automation, Mesa, AZ, USA
GERALD T. MACKULAK, Arizona State University, Tempe, AZ, USA
ABSTRACT Semiconductor factory design methodology must apply a systems approach to build a cost-effective solution. The use of industrial engineering analytical approaches, computerized analysis and intelligent CAD tools in a collaborative environment can assist in the risk reduction of designing a new type fab. Industrial engineers working with the customer and various disciplines can create a new concept that allows complete confidence in the final design.
This may allow the factory designers more freedom in creating zones that are adaptable to equipment, process, and manufacturing changes with automated material logistics as the linkage between process modules.
 Fab Design and Development Methodology Must Change to Allow for Successful Integration of Systems
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Cleanroom 
