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32nd Edition: Short-interval detailed production scheduling in 300mm semiconductor manufacturing... |
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Dec 20, 2006 at 05:15 PM |
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Robert Bixby, ILOG Inc., & Rich Burda & David Miller, IBM, USA
ABSTRACT Fully automated 300mm manufacturing requires the adoption of a real-time lot-dispatching paradigm. Automated dispatching has provided significant improvements over manual dispatching by removing variability from the thousands of dispatching decisions made every day in a fab. Real-time resolution of tool queues, with consideration of changing equipment states, process restrictions, physical and logical location of WIP, supply chain objectives and a myriad of other parameters, is required to ensure successful dispatching in the dynamic fab environment.
32nd Edition: Short-interval detailed production scheduling in 300mm semiconductor manufacturing using mixed integer and constraint programming
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