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Order Win: Major chipmaker selects copper CMP slurries from ATMI and Anji Microelectronics |
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Apr 30, 2007 at 04:31 PM |
ATMI and Anji Microelectronics have announced that their new CMP slurries for copper/barrier layers have been selected by a major chip manufacturer, which is the first volume production win the partners have received to date.
"For copper interconnect, ATMI has the most comprehensive materials offerings and expertise designed to improve process efficiency by speeding time-to-market and lowering cost of ownership for our customers. This, our first win for high volume production of our advanced Copper/Barrier CMP slurries, is also the first in a series of solutions that ATMI and Anji plan to introduce designed to remove the multiple inefficiencies in the CMP process - one of the most expensive materials processes in integrated circuit production," said Doug Neugold, President and Chief Executive Officer of ATMI.
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