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Tool Order: New Taiwan foundry customer places multiple ALD orders with Aviza |
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Apr 24, 2007 at 12:22 PM |
 A Taiwan foundry has placed a multi-system, multi-chamber order with Aviza
Technology for its ‘Celsior' single-wafer, atomic layer deposition (ALD) system. The tools will be used to support 90nm and below production requirements at a 300mm fab, Aviza said.
"We are very pleased to have received this multi-system order from this foundry customer, which also marks a new ALD customer win for Aviza, enabling the company to further expand its global presence and increase its ALD market penetration," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "This order was a result of Aviza's ability to demonstrate its expertise and experience with high-volume ALD production to enable advanced DRAM device manufacturing."
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