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KLA-Tencor’s TeraScanHR mask inspection system installed at Toppan Printing |
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Apr 17, 2007 at 04:28 PM |
 The recently launched (March 2007) TeraScanHR mask inspection system from KLA-Tencor has been installed in a Toppan Printing photomask shop for 45nm production photomasks.
"Establishing inspection technology is one of the highest priority issues in developing and manufacturing leading-edge photomasks," stated Akihiro Nagata, senior managing director and head of Semiconductor Solutions Division of Toppan Printing Co., Ltd., "By combining each company's sophisticated technologies, I believe that we can supply our chipmaker customers with advanced photomasks that contribute to improving efficiency of the most advanced IC development and production."
"Our collaboration with Toppan during the first customer beta evaluation of the TeraScanHR system was extremely valuable, not only because of Toppan's technical expertise as one of the world's most advanced mask manufacturers, but because of its access to a wide range of mask types and device designs," said Harold Lehon, vice president and general manager of KLA-Tencor's Reticle and Photomask Inspection Division. "Having Toppan validate the advancements made in the TeraScanHR system in a very demanding real-world maskmaking environment proves the effectiveness of our technology for 45nm and below mask generations."
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