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10th Edition: Ethernet Solutions for Fault Detection and Yield Enhancement |
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Feb 03, 2005 at 04:49 PM |
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JOHN CONWAY, Schneider Electric, Raleigh, NC, USA
JEFF. SEWARD, IBM Microelectronics, Burlington, VT, USA ABSTRACT
This
paper discusses the implementation challenges encountered when
integrating smart sensors with manufacturing equipment to detect
processing faults and improve yield. To overcome these problems,
reliable and industry-hardened solutions must be deployed which are
based on an open architecture. Certain sensor-based solutions must be
able to perform control functions in real-time (measured in
milliseconds) and if necessary intervene to halt the manufacturing
process independently of the Manufacturing Execution System (MES) and
Advanced Process Control (APC) system.
Additionally, the use of
commercial PCs on the factory floor must be limited. These requirements
logically led to the selection of fully integrated Programmable Logic
Controllers (PLC) to perform the real-time data collection and control
functions. Fault-tolerant networking topologies for integrating
sophisticated sensors are examined. The approach is centered upon the
use of the SEMI Sensor Bus standard based on MODBUS TCP/IP Ethernet.
This methodology leverages leadership in networking technology. The
standard, and the integration advantages it offers, is explained along
with examples of its use on critical process tools in the fab. Linked
to this is the integration of the sensors within the APC framework,
which is also discussed.
The end result is a system which will speed
the acquisition of critical process information by driving
internet/intranet technologies down to the sensor level. What is
achieved is great simplification of the deployment and support of smart
sensor technologies on the factory floor.
 Ethernet Solutions for Fault Detection and Yield Enhancement
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Wafer Processing 
