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10th Edition: Increasing Overall Equipment Effectiveness (OEE) in Fab Manufacturing |
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Feb 02, 1999 at 04:36 PM |
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SASS SOMEKH, Applied Materials, Inc., Santa Clara, CA, USA ABSTRACT Over the past couple of years, many semiconductor manufacturing executives have lamented about the low state of equipment utilization in their fabs. Indeed, the phrase overall equipment effectiveness (OEE) is now frequently seen in articles or discussions about fab manufacturing.
Increasing Overall Equipment Effectiveness (OEE) in Fab Manufacturing
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