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Air Liquide Electronics dedicates new lab to post-CMP copper cleaning strategies |
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Mar 23, 2007 at 10:32 AM |
 Air Liquide Electronics has established a new development laboratory near its Dallas, Texas headquarters that will specialize in developing post-CMP copper clean chemistries and related technologies.
"A fundamental feature of this new facility is our ability to offer custom engineered clean formulations to the market faster, helping customers take immediate advantage of performance and cost efficiencies," stated Rich Jahr, president of Air Liquide Electronics U.S. LP. "Customers now have access to engineered solutions outside of their fab, while keeping their tools and manufacturing operations in full production."
Air Liquide plans to use the facility to also replicate customers' current and next generation CMP fab processes and optimize customers' clean processes. 200mm integrated polisher/cleaner tool and associated surface and chemical metrology equipment will be housed in the facility. The lab will also work closely with Air Liquide's Balazs Analytical Services division to improve performance verification of customer products.
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Materials & Gases 
