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Air Products to add 500 metric tons of nitrogen trifluoride capacity |
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Feb 12, 2007 at 05:17 PM |
 Air Products has broken ground on the first phase of its new nitrogen trifluoride (NF3) plant in Ulsan, Korea, which on completion will add 500 metric tons of the chamber cleaning gas to Air Products' capacity. Annual production will reach 2,500 metric tons in 2008, according to the company.
"The recent groundbreaking reinforces our commitment to our semiconductor and TFT-LCD customers around the globe that we will remain the world's leading supplier of NF3," said Corning Painter, vice president of Electronics at Air Products.
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