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11th Edition: Piezoelectric Materials: An Unheralded Component |
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Jan 03, 2000 at 03:52 PM |
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STEVEN M. PILGRIM, New York State College of Ceramics at Alfred University, Alfred, NY, USA ABSTRACT
Piezoelectric materials are the unsung heroes of materials that are used by the IC fabrication engineer - hard working and reliable with minimum maintenance. The theory relating stress, strain and electric field is described and various extensively used piezoelectric materials reviewed and the application of these materials into precision equipment is examined in detail.
11th Edition: Piezoelectric Materials: An Unheralded Component
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Lithography 
