James Beasley, ISMI, USA

ABSTRACT

"Green manufacturing" has become one of the most popular slogans in the semiconductor world, but its use often pertains to specific processes and products.  While commendable, these green products and processes are merely part of a more global vision that the industry must adopt to inculcate environmental manufacturing into current and new chip factories.  The Green Fab - an integrated system of specially engineered tools, methods, products and supporting technologies - must become the industry's ultimate environmental goal.  In this article, we define the Green Fab design; identify its drivers and benefits; survey the current state of Green Fab design; and introduce ISMI's Green Fab Initiative, an effort to extend environmental best practices and standards throughout the industry.