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11th Edition: Towards Polynomial Correction Factors for Digital Mass Flow Controllers |
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Jan 03, 2000 at 03:38 PM |
PASCAL RUDENT, Qualiflow® SA, Montpellier, France
ABSTRACT In the semiconductor industry, most gases are hazardous and toxic. Mass Flow Controller manufacturers calibrate their devices with a surrogate gas and apply a correction factor to simulate thebehaviour of the process gas. However, when this constant factor is used, the accuracy of the calibration is not precise. Qualiflow has made a numerical simulation of the sensor of the Mass Flow Controller to build polynomial correction factors.
This approach when added to numerical control of digital Mass Flow Controllers will be a crucial step towards accurate and customised ‘multicalibrated' Mass flow Controllers. It will be possible for the customer to calibrate the MFC for another gas at another flow-rate from an existing calibration with high accuracy.
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