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Home arrow Cleanroom arrow Edition 11 arrow 11th Edition: Next-Generation PFA for the Semiconductor Industry
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11th Edition: Next-Generation PFA for the Semiconductor Industry Print E-mail
Jan 03, 2000 at 03:36 PM
Katsuhide Otani, Daikin Industries Ltd, Osaka, Japan

ABSTRACT

PFA (tetrafluoroethylene and perfluoroalkylvinylether copolymer) is used to manufacture tubing, wafer baskets, tank linings, etc. used in the wet processes of the semiconductor industry. We have developed a new type of PFA to meet the market demand for higher purity and performance. Its main characteristic is reduced spherulite size, which is controlled to improve the transparency, smoothness, and solution permeability of the final components.


 

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