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Tool Order: ASML receives 2 more orders for EUV Lithography tools |
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Jan 17, 2007 at 12:01 PM |
 ASML has announced that it has received 2 more confirmed orders from individual companies for pre-production EUV lithography tools. Deliveries are expected to begin in 2009, according to Eric Meurice, president and CEO of ASML during a press conference to discuss fourth quarter and year-end financial results.
ASML received its first customer order for a pre-production EUV lithography tool in October 2006. This would mean ASML received 3 EUVL orders in the fourth quarter of 2006.
ASML has already shipped two Alpha Demo EUV tools to research facilities (picture shows EUVL tool in Albany USA facility, December 06) in 2006, with final installation expected early in 2007. The Alpha tools are estimated to have costs of approximately €35 million each. Customer pre-production tools are estimated to cost in the region of €45 million each.
The tools are expected to handle process qualification at the 32nm node and below for production applications in 2011.
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Lithography 
