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Tool Order: Memory manufacturer selects Semitool for copper ECD processing |
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Jan 10, 2007 at 04:36 PM |
 A memory IC manufacturer has selected Semitool's Raider copper electroplating platform for production applications, according to the company. Although the use of copper interconnects in memory devices is only at the early stage of transition and makes up a very small percentage of the overall copper ECD market, according to VLSI Research, memory manufacturers are aggressively expanding production and are expected to make up approximately 55 percent of capital spending in 2007.
"Memory manufacturers know that the requirements for copper damascene in
DRAM and FLASH memory applications are unique and more demanding than those of their logic-manufacturing counterparts," stated Klaus Pfeifer, Semitool's general manager for copper ECD. "Smaller features require more advanced technology for copper fill. At the same time, the highly competitive nature of the memory market demands the lowest cost of ownership. Semitool's Raider ECD delivers on both of these counts with the productivity and extendibility customers need to meet their long-term goals."
Larry Murphy, president and chief operating officer, said: "With this new customer win we have expanded our very strong market share position in the copper memory market and continue to maintain our momentum in this market area. Our focus on providing both the capability required by smaller nodes used to make memory devices, as well as the lowest cost per wafer pass, puts us in a compelling position. We expect this to continue as logic device customers move to the geometries used in memory chips."
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