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Product Briefing Outline: KLA-Tencor has unveiled the ‘MRW3', its third-generation magnetic metrology system for the hard disk drive (HDD) and semiconductor memory markets.  Based on the ‘MRW200' platform, the MRW3 measures the magnetic properties of HDD recording heads and magnetoresistive random access memory (MRAM) on product wafers for production control and early detection of process issues that could adversely impact yield. The MRW3 system has completed an extensive beta evaluation at one of the world's leading semiconductor manufacturing companies, according to the company.


Problem: Advanced HDD recording heads, as well as MRAM, a leading candidate for next-generation non-volatile solid state memory, use magnetic tunnel junctions for their core technology.  The MRW3 system incorporates specific features to accelerate the development of this important new technology, including constant-voltage electronics and bit toggle tests.  According to Janusz Nowak, a leading researcher in the field of magnetic tunnel junctions, "The KLA-Tencor MRW3 provides essential measurement capability that accelerates the development and production of devices using magnetic tunnel junctions."

Solution: A proprietary closed-loop magnet system is used to enable the MRW3 to deliver improved magnetic field repeatability of less than 0.1 oersted, without sacrificing its performance advantage of sub-one second per resistance/magnetic-field transfer curve.

Applications: The MRW3 measures the magnetic properties of HDD recording heads and magnetoresistive random access memory (MRAM) on product wafers

Platform: The tool incorporates GEM/SECS factory automation that the company claims give high reliability (1,000 hours MTBF) in both 200-mm and 300-mm configurations making it the first "fab-ready" quasi-static test system on the market today.  

Availability: May 2006 onwards.