11th Edition: Conserving Natural Resources in Wafer Fabs

Jan 03, 2000 at 03:23 PM

Roger Bonisolli & Charles Lynn, ADP Marshall, Tucson, AZ, USA

ABSTRACT

Wafer fabs consume large quantities of power and water. With the transition to 300 mm, the trend of increasing consumption must be reduced. This paper presents strategies to reduce energy and water consumption.

Conserving Natural Resources in Wafer Fabs

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