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Tool Order: Powerchip orders production immersion tool from Nikon |
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Dec 14, 2006 at 12:50 PM |
 Powerchip Semiconductor Corporation (PSC) has continued its long-standing supplier relationship with Nikon Precision with the memory manufacturer selecting Nikon's NSR-S610C ArF immersion scanner for its 50nm NAND Flash process at its 300mm fab 12M, located in Hsinchu, Taiwan and dedicated to NAND Flash production. This is one of the first production immersion tool orders for the NSR-610C, which uses catadioptric optics of NA 1.3. Shipment schedules were not disclosed.
"We are pleased that Powerchip selected us as their supplier for immersion lithography technology," said Kazuo Ushida, President of Nikon Precision Equipment Company. "This continues our strong, existing relationship with Powerchip for both leading edge tools and non-critical layer lithography."
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