|
Tool Order: US based GaAs fab orders mass metrology system for Metryx |
|
|
|
Dec 14, 2006 at 11:33 AM |
A US-based GaAs volume manufacturer of SAW and BAW devices for the communications industry has placed an order for with Metryx, Limited, for its Mentor OC23 Mass Metrology system. The GaAs manufacturer plans to use the OC23 in a volume production, measuring both deposition and etch processes on product wafers.
"We continue to see increasing interest in our unique mass metrology systems from a wide variety of manufacturers," stated Dr. Adrian Kiermasz, President and CEO of Metryx. "Because the Mentor offers a non-interfering in-line approach and is not dependant on the substrate it can be implemented across the full spectrum of manufacturing technologies. By allowing manufacturers to identify changes in process performance on a wafer-to-wafer basis any potential issues can be quickly addressed to save considerable time and money."
|