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Entegris installs 300th Aeronex gas purification system |
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Dec 07, 2006 at 05:54 PM |
 Entegris has surpassed the 300th ‘Aeronex' Gas Purification System installation that uses clean dry air as a gas purification solution with sub-parts-per-billion (ppb) capability.
"The industry has been clamoring for an alternative to conventional gas purification systems that can cause process variability, reduce yield and shorten tool life," said Patrick McKinney, vice president and general manager of microenvironments, Entegris. "Semiconductor manufacturers are recognizing the benefits of reducing total cost of ownership and achieving continuous pure gas supply by deploying Aeronex systems. It's a clear, compelling alternative to legacy methods."
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Materials & Gases 
