|
Asyst’s Spartan EFEM notches 100th shipment |
|
|
|
Dec 05, 2006 at 05:07 PM |
 The Spartan EFEM (equipment front-end module) platform from Asyst Technologies, Inc. has notched up 100 unit shipments since being launched several years ago as a new, highly reliable EFEM that significantly reduces downtime of the critical sub-system used to connect the 300mm AMHS system FOUPS to the process tool in volume production fabs.
"Over the past 18 months, the Spartan has been selected by nine OEMs for deployment on their new tools. This has led to a dramatic increase in Spartan EFEM shipments over the past six months, as these OEM customers are beginning to roll out volume production of these new tools," said Grant Imper, vice president, factory interface products, Asyst.
The Spartan EFEM has achieved more than 15 product design wins across a broad spectrum of OEM tool manufacturers and applications, including metrology, cleaning and strip since inception and is made on the same platform as Asyst's Spartan wafer Sorter.
|
News 
