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Tool Order: Hynix standardizes on ASML's LithoCruiser |
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Nov 30, 2006 at 09:16 AM |
 Hynix Semiconductor Inc. has standardized on ASML's LithoCruiser software for lithography simulation and mask optimization when using ASML's lithography scanners for critical layers below 60nm on DRAM and flash memory devices.
"As a provider of leading-edge memory devices, it is critical for us to maximize the imaging performance and process windows in our production fabs," said Dr. Dong Gyu Yim, Senior Member of Technical Staff, R&D Department, Hynix. "ASML proved to be a trusted partner by implementing all the necessary functions and features in LithoCruiser that fully met our requirements."
ASML has been a long-standing supplier of lithography tools to Hynix. The terms of the contract were not disclosed.
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