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12th Edition: Better Productivity and Faster Cycle Times Through Single- Wafer Processing |
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Feb 03, 2005 at 02:07 PM |
HANS KRUWINUS & HEINZ OYRER, SEZ AG, Villach, Austria
ABSTRACT
Significantly better productivity and improved cycle times are two
aspects of the future of semiconductor manufacturing. Faster cycle
times, better equipment utilisation and faster yield ramps dictate a
flexible factory with small batch sizes and fab-wide automation. Full
automation will be a key foundation for all 300 mm factories; this is a
critical enabler for single-wafer lot processing. As the industry
continues to move to more single-wafer processing, cycle times will
continue to decrease. This article demonstrates the benefits of
single-wafer spin-process equipment versus a wet bench. It shows that
using single-wafer lot processing keeps us on the industry's blistering
costreduction path.
 Better Productivity and Faster Cycle Times Through Single- Wafer Processing
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Wafer Processing 
