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Tool Order: Asian foundry to use FSI’s ‘ANTARES’ for post parametric test cleaning |
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Oct 18, 2006 at 01:21 PM |
 A leading Asia-based foundry has placed a repeat order for multiple ‘ANTARES' CyroKinetic cleaning systems from FSI International. The unnamed foundry currently employs the ANTARES system for various FEOL and BEOL particle removal processes, and with this order is adding capacity for more in-line parametric test clean-up at the 65 and 90nm technology generations. The systems are expected to ship over the next several quarters.
"We're very pleased to offer a process that directly impacts this customer's bottom line," said Don Mitchell, FSI International chairman and CEO. "By providing our customer with an effective way to do in-line parametric test clean up, they benefit from higher test wafer yield and revenue; a further testament to FSI's ability to provide the
industry with some of the most cost effective cleaning solutions available today."
FSI also stated in its fourth quarter financial conference call with analysts that it had also received a new order for its ‘MAGELLAN' Immersion cleaning system. The company is expecting further orders by the end of the calendar year.
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