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Tool Order: Large U.S. IDM orders multiple inspection systems from Olympus-ITA |
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Oct 17, 2006 at 08:07 PM |
A large U.S. integrated device manufacturer (IDM) has placed multiple tool orders with Olympus Integrated Technologies America (ITA), a subsidiary of Olympus Corporation of Japan.
The IDM has selected Olympus' AL3100 inspection and review station and
the FR3200 DUV (pictured) automated defect review station. This is also
the first order Olympus has received from this customer, according to
the company. "This customer will utilize our capable and flexible systems in various configurations to meet their requirements for inspection and defect review throughout the fab, from photo to the test floor," said Olympus ITA president Greg Baker. "We can offer the customer broad capability and flexibility in system configurations on a common platform, giving the customer a very cost effective solution for a variety of applications within the fab."
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