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Tool Order: ASML receives first customer order for pre-production EUVL tool |
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Oct 17, 2006 at 06:11 PM |
 ASML has received its first customer order for a pre-production EUV lithograpy tool that will be shipped in mid-2009 at a cost of approximately 45 million Euros. ASML has recently shipped two Alpha Demo EUV tools to research facilities that would have costs approximately 35 million Euros each.
"The delivery of our EUV Alpha Demo Tools and the milestones reached by our EUV-partners will support further development of EUV technology," said Martin van den Brink, executive vice president, marketing and technology, ASML. "EUV pre-production tools could be shipping as early as 2009 if customers need them." The customer tool is expected to assist in qualification work for IC devices planned for production at the 32nm node and below in 2011. The tool will later be upgraded to full production spec with approximately 100 wafers per hour throughput, subject to continuing developments in EUV light sources.
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Lithography 
