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BOC Edwards reaches 2000 iGX pump sales |
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Oct 17, 2006 at 05:43 PM |
 BOC Edwards has announced that it has sold its 2000th iGX pump since its introduction at SEMICON West in July 2004. The company believes that this confirms the product's position as the de facto dry pump standard within the semiconductor industry for clean to medium-duty applications.
"We are very proud to have achieved this goal," said Chris Shaw, global product manager, semiconductor dry pumps, BOC Edwards. "The iGX has rapidly become a mainstay in our product line and we expect it to continue in that role. It is particularly gratifying to realize the level of customer confidence and satisfaction that these sales denote. In addition to a feature set that seems to be a near perfect fit with our customers' requirements, the iGX has established an excellent reputation for reliability."
The iGX pump is used predominantly in 300mm fabs for applications such as load lock, transfer, metrology, lithography, PVD process and pre-clean, RTA, strip/ash, oxide, silicon and metal etch, and implant sources.
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