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MKS Instruments acquires Novx to expand cleanroom control portfolio |
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Oct 11, 2006 at 06:23 PM |
Novx Corporation, a provider of electrostatic charge monitoring technology used in semiconductor cleanrooms and related industries, has been acquired by MKS Instruments and will be integrated into MKS's Ion Systems product group, which manufacturers ESD preventive products. Terms of the transaction were not disclosed. Novx, based in San Jose, California has 14 employees.
"MKS is focused on improving process performance and productivity in semiconductor and other technology-driven markets," stated Leo Berlinghieri, MKS's Chief Executive Officer and President. Novx's technology expands our capability to monitor, detect and control electrostatic charge in advanced process environments, such as semiconductor and hard disk drive manufacturing. Particle contamination from electrostatic charge attraction can cause damage in wafer manufacturing and other advanced processes. There is a need for continuous real-time electrostatic charge monitoring to increase manufacturing yields. To solve this problem, we plan to optimize closed-loop ionization control by integrating Novx's sensor technology and data acquisition software with Ion Systems' ionization technology for managing electrostatic attraction and discharge."
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