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Air Products to expand NF3 facilities in Korea as demand rises |
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Oct 04, 2006 at 05:52 PM |
 Air Products plans to construct a nitrogen trifluoride (NF3) plant in Ulsan, Korea to support the manufacturing growth of both 300mm semiconductor fabs and liquid crystal display (LCD) plants. This is the second Electronic Specialty Material (ESM) investment at Ulsan since 2005 when the company started ultra-high purity ammonia production.
"This new manufacturing facility is part of a multi-year investment strategy to build on our leading specialty materials position and enhance our ability to serve our semiconductor and TFT-LCD customers anywhere in the world," said Mike Hilton, vice president and general manager, Electronics and Performance Materials at Air Products.
The first phase of the new plant will produce in excess of 500 metric tons per year and will be completed in late 2007. Upon completion, global NF3 capacity will be more than 2,500 metric tons per year, according to the company.
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