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New Product: Applied Materials employs ‘virtual sensors’ in new APC platform |
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Sep 25, 2006 at 02:11 PM |
 Product Briefing Outline: Applied Materials has launched ‘NeXus SPC', its next generation advanced process control software and hardware, used exclusively on a range of Applied's 300mm process tools. The new diagnostic tool performs split-second analysis of process conditions which is critical information that can increase system uptime and yield, protect wafers from process drift and enable more cost-effective maintenance schedules. Currently, Applied customers employ the NeXus platform on more than 350 of its process systems worldwide.
Problem: Unlike any other system monitoring tools, NeXus SPC monitors
critical process parameters up to 100 times per second (100Hz),
combining data from multiple process and chamber sensors to create
real-time patterns that immediately spotlight and track changing
process conditions.
Solution: ‘NeXus SPC' provides a real-time window into the complete
process environment, including factors upstream of the process chamber
itself. In addition to real-time and historical data visualization
capabilities, a powerful feature of NeXus SPC is its use of ‘Virtual
Sensors'. These algorithms construct models from many different types
of process and chamber sensors and create sophisticated alert
capabilities based on users' pre-defined control limits.
Applications: Applied ‘Vantage' ‘Radiance Plus RTP', Applied ‘Vantage
RadOx' ‘RTP' and Applied ‘Centura Epi' systems. Additional systems will
feature NeXus SPC in the future, according to the company.
Platform: NeXus SPC hardware is installed in a system's factory
interface and requires no additional footprint. The platform leverages
both existing and emerging equipment connectivity standards to enable
tools and processes to utilize the high-resolution analysis required
for 300mm manufacturing; it can correlate data across time, across
systems, and across fabrication facilities, helping customers quickly
find and correct process or hardware excursions.
Availability: June 2006 onwards.
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