R. Torres, D. Fraenkel, J. Vininski, E. Hennig, T. Watanabe, & V. Houlding, Matheson Gas Products, Longmont, CO, USA

Purification of high-pressure corrosive gases has traditionally utilised a pressure regulator prior to introduction into the purifier. However, reported regulator failures have been shown to be a major disadvantage of using this conventional configuration. Such failures are a great concern owing to the damage they may cause to downstream components such as pressure transducers, mass flow controllers, and on-line monitors. A high-pressure source gas purifier installed before the regulator offers a solution to this common problem. Recently, a new purifier for corrosive gases has been developed that can be used up to full cylinder pressure for source gas purification.