Online information source for semiconductor professionals

AIXTRON AG has purchased two GaNcat abatement systems to increase its already instated Edwards exhaust treatment system. The purchase is a noteworthy expansion in AIXTRON’s abatement capacity and will use the GaNcat systems in its R&D laboratory in Aachen, Germany to manage the exhaust generated by the metalorganic chemical vapor deposition (MOCVD) process.

“The GaNcat system is an ideal solution for MOCVD exhaust management,” said Dr. Paul Rawlings, General Manager of Edwards’ Exhaust Management Business. “We are particularly encouraged by AIXTRON’s adoption of the system and the potential it brings as AIXTRON’s tools proliferate in the market.”

Edward’s GaNcat system uses dry chemical technology to reduce operating costs by eliminating the need for fuel and water in the abatement process. The system treats the ammonia flows present in the exhausts of nitride-based MOCVD processes by decomposing the gas into its constituent elements, nitrogen and hydrogen, by using heated dry cartridge technology. Every GaNcat cartridge has the ability to treat up to 20slm of ammonia.