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CNSE receives newly designed water re-cycling system from BOC Edwards |
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Sep 12, 2006 at 06:33 PM |
 BOC Edwards Installs Innovative ERIX Water Treatment System at UAlbany
Nanocollege's Albany Nanotech Complex; ERIX Recycles Scrubber Water and
Improves Efficiency of Back-Pad Treatment Facilities
BOC Edwards has installed its developmental ERIX (Electrochemically
Regenerated Ion Exchange) wastewater treatment system at the College of
Nanoscale Science and Engineering (CNSE) of the University of Albany's,
Albany NanoTech complex in New York. ERIX is not expected to be
commercially available until sometime in the first half of 2007.
The
ERIX system is claimed to recover 90 percent of point-of-use (POU)
scrubber water, reducing water consumption and concentrating the
hydrofluoric acid (HF) in the effluent sent to back-pad precipitation
facilities.
"This is an important step in our development
program for ERIX," said Nigel Hunton, director, semiconductor
equipment, BOC Edwards. "It will give us real world experience in a
facility developing state of the art processes for the 45nm technology
node and beyond. "
"The UAlbany NanoCollege is committed to
promoting world-class education and research that is designed to
support and advance the nanoelectronics industry," said Dr. James G.
Ryan, professor of nanoscience and vice president of technology at
CNSE. "We are pleased that BOC Edwards can report a successful
installation of its new ERIX system at CNSE's Albany NanoTech complex,
adding still another cutting-edge capability to a high-tech facility
that is unparalleled in the academic environment."
ERIX ion
exchange media, according to the company is electrically regenerated,
which adds no new chemicals to the HF treatment process. The
concentrated effluent from ERIX (in excess of 1200 ppm) reduces the
hydraulic load and chemical consumption of the precipitation process.
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