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JOHN J. PLATA, Texas Instruments Inc., Dallas, TX, USA

ABSTRACT

300mm production factories require billion dollar plus investments in facilities, infrastructure, and manufacturing tools. The facilities, tool sets and manufacturing protocols for 300mm wafer fabs are quite different compared to state-of-the-art 200mm fabs. These factors present both the obligation and opportunity to make a step-function move toward sustainability and lower cost by optimising resources in all areas of the 300mm fab. Texas Instruments has followed a conservative approach to 300mm implementation. Their 300mm strategy relies heavily on expertise from its 200mm fabs, alliances with consortiums, vendors, and subcontractors, and is implemented with a “waste nothing” approach through use of an existing fab shell, and a cautious tool evaluation and selection process. Minimal changes in key utility infrastructure systems reduced risk and added value through shared resources and staged implementation. Use of leading edge fab hardware and software automation, coupled with changes in manufacturing operations offers opportunities for enhanced tool utilisation, better operator productivity, and higher yields.