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Home arrow Cleanroom arrow Edition 12 arrow 12th Edition: Resource Optimisation for 300mm
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12th Edition: Resource Optimisation for 300mm Print E-mail
Jun 03, 2000 at 11:22 AM

John J. Plata, Texas Instruments, Inc., Dallas, TX, USA

ABSTRACT

300mm production factories require billion dollar plus investments in facilities, infrastructure, and manufacturing tools. The facilities, tool sets and manufacturing protocols for 300mm wafer fabs are quite different compared to state-of-the-art 200mm fabs. These factors present both the obligation and opportunity to make a step-function move toward sustainability and lower cost by optimising resources in all areas of the 300mm fab. 

12th Edition: Resource Optimisation for 300mm
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