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A life-cycle cost (LCC) fab model – interaction between activities in IC manufacturing and their s
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N. Van Hoornick, K. Van den Broeck, J. Van Hoeymissen & M. Heyns, IMEC, Heverlee, Belgium, W. Riedel & C. Braun, M+W Zander, Stuttgart, Germany
ABSTRACT
This article describes a life-cycle cost model that takes the complex interaction between activities in ICmanufacturing and their supporting facilities within a fab into account. In addition, the model provides all necessary outputs for environmental impact modelling such as gaseous emissions, concentrations of wastewater compounds, etc.
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