ABSTRACT

Semiconductor manufacturing requires usage of many different chemicals in various states of gases, liquid and solid materials. Air permitting is the most complex and long lead permit application phase associated with new and expansion plans in semiconductor processing.There are virtually one hundred chemicals to project, quantify and estimate potential emissions from numerous process equipment and air pollution devices. The detailed spreadsheet will show the complexity of the proposed facility and associated permit application process in the San Diego County Air Pollution Control District located in southern California.

12th Edition: Air Permit Issues