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12th Edition: Automated Yield Management Software in LCD Production |
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Feb 03, 2005 at 11:03 AM |
ANKUSH OBERAI & SAMUEL TAM, Knights Technology, Sunnyvale, CA, USA
ABSTRACT
In
the highly-competitive LCD manufacturing business, small percentage
differences in yields can spell the difference between success and
failure. By applying the same automated yield management tools that
have been available for years to the semiconductor industry,
manufacturers can increase yields by rapidly identifying specific
problems in their production lines. LCD manufacturing poses a number of
unique problems not present in the semiconductor industry, and these
challenges must be solved to create a useful yield management system.
LCD and semiconductor manufacturing share some similar features.
Both
depend on a series of complex procedures performed under exacting
controls to create sophisticated devices. Multiple items are fabricated
on a single substrate using lithography, deposition, and etch
technologies. And unfortunately, the processes are not perfect, and
defects can occur that may render the final product useless.
 Automated Yield Management Software in LCD Production
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Wafer Processing 
