Sunniva Collins, Ph.D, Swagelok Company, Solon, Ohio, USA

ABSTRACT

SEMI F78 and F81, together with revisions to F20, represent important steps in the evolution of the semiconductor industry. Contamination and corrosion are issues of great concern in the semiconductor industry - and they will remain so, as line widths continue to shrink and new processes are brought on line. Gas Tungsten Arc (GTA) welding involves practices and procedures - variables - in the equation. A systematic, standardized approach, as outlined in new SEMI standards, ensures that human error is held to a limit and unsuccessful welds are understood as the result of specific, identifiable variables. The SEMI standards concerning GTA welding are useful and specific, and are intended to improve outcomes in everyday applications.