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Nova extends reach to x-ray semiconductor metrology |
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Aug 10, 2006 at 01:34 PM |
 By Dr Mike Cooke
Process control metrology system provider Nova Measuring Instruments has completed the purchase of substantially all the assets of HyperNex for 1.6 million shares and has assumed certain liabilities, including those accruing after the closing which relate to contracts assumed by Nova. Prior to the closing, Nova and HyperNex amended and restated the original asset purchase agreement to reduce the amount of shares to be issued by Nova from 1.8 million to 1.6 million to reflect the assumption of certain additional liabilities. Based on the closing price of Nova's stock on August 7, 2006 and the assumed liabilities, the transaction is valued at approximately $4.5 million. HyperNex is based in Pennsylvania, while Nova is an Israeli company.
The HyperNex acquisition will expand Nova's capabilities to include wide-angle x-ray diffraction (XRD). Nova estimates the potential market at $50 million, doubling in size over the next two to three years. HyperNex has developed and manufactures a wide-angle XRD stand-alone metrology system for advanced semiconductor fabs. Its wide-angle XRD tool has very high throughput compared to other XRD tools presently in the market, says Nova. It utilizes patented technology and has been used in semiconductor production since 2004. When used in high volume manufacturing, XRD can provide the needed measurement for characterizing microstructures based on multiple parameter capabilities. This capability enables control of the quality of thin metal layers such as copper, tungsten, silicides, seed and barrier layers at the 65nm, 45nm and below technology nodes.
Dr. Giora Dishon, president and CEO of Nova, comments: "HyperNex will complement our offering in the high-end stand-alone metrology market and complement our Spectrophotometry and Scatterometry based solutions, which will enable us to provide complete metrology solutions for critical steps such as gate structures and copper interconnect."
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