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Korean toolmaker selects Brooks’ vacuum automation platform |
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Jul 07, 2006 at 11:47 AM |
.jpg "Image") South Korean semiconductor production tool company Jusung Engineering
Ltd. recently placed a significant multi-million dollar, multi-system
order for Brooks Automation's Gemini Express 6000 (GX6000) vacuum
system. Jusung provides equipment for critical processes such as ALD,
anneal, etch and a range of CVD applications along with advanced PECVD
equipment for the LCD flat panel display (FPD) manufacturing industry.
The GX6000 features an industry standard cluster configuration using a
patented direct drive vacuum robot. The Brooks GX6000 can support up to
four process modules and two load locks. It is integrated with an
atmospheric equipment front end module (EFEM) and can support up to
four load ports. The GX6000 can be used for a wide range of
semiconductor processes carried out in vacuum such as PVD, CVD, ALD,
cleaning, ashing, RTP, and etch. The GX6000 will be employed as the
backbone for semiconductor wafer transport in Jusung's leading edge
300mm deposition and other critical processes.
Young-Gon Lee, executive vice-president of sales and marketing of
Jusung Engineering, reports: "We have recently won significant new
business from semiconductor customers not only in Korea but also in the
United States, Taiwan, Japan, France and Germany for our process
equipment. We have received a lot of interest in our new unique
semi-batch design for atomic layer deposition (ALD) for dielectric and
metal film, which maximizes throughput with excellent film uniformity.
The GX6000 system is the ideal platform for our application."
Brooks already provides transport systems for Jusung's LCD process
equipment used by FPD manufacturers in Korea, Taiwan and China.
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