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Tool Order: Qimonda selects Aviza’s single wafer ALD system for 90nm production |
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Jun 19, 2006 at 03:08 PM |
 ‘One of the world's largest DRAM suppliers based in Europe,' believed to be Qimonda AG has selected Aviza Technology's next generation ‘Celsior' single wafer ALD deposition tool for 90nm node volume production of DDR2 DRAM at its 300mm fab in Dresden Germany.
"Aviza's Celsior ALD system offers the critical hardware and process capabilities demanded by this very precise deposition technology to satisfy chipmakers' stringent production requirements for 90-nm and below geometries," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "We believe Celsior offers the cost of ownership advantages and demonstrates the proven productivity that our customers seek."
The new order followed an onsite evaluation of the Celsior system in a production environment, according to the company. Aviza has announced several Celsior ALD tool orders in recent months that have come from memory fabs in Taiwan, China and now Europe.
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