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Tool Order: National Semiconductor orders 200mm single wafer Optima MD from Axcelis |
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Jun 15, 2006 at 10:26 AM |
 National Semiconductor has ordered a 200mm single wafer configured Optima MD ion implanter from Axcelis Technologies. This is the first such purchase by National Semiconductor and the second Optima MD Axcelis has sold in the 200mm configuration. National Semiconductor is a long-standing customer of Axcelis. The Optima MD implanter will be shipped to the chip manufacturers fab in South Portland, Maine in the third quarter of 2006.
"Axcelis and National Semiconductor have shared a long history of success in the mid dose arena," said John McClean, senior buyer for National Semiconductor's Maine facility. "The Optima MD's low energy capability, superior angle control and zero energy contamination made the choice to continue our relationship with Axcelis an easy one."
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