Martine Ribeyron & Michel Fuentes, STMicroelectronics, Crolles, France; Alain Ferreres, STMicroelectronics, Rousset, France

ABSTRACT

In the semiconductor field, the ITRS roadmap defines the guidelines for Facilities Fluids Quality, according to the technology node. However direct correlation between fluid purity and line widths/wafer yield is difficult because many other parameters must be considered such as: process recipes, process tools parameters etc. Although changes in technology can sometimes require higher fluid quality, the most daunting task for the Facilities group is to design fluids dispensing systems able to face rapid Fab start up with the required quality.