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Tool Order: SMIC selects new ALD tool from Aviza for 90nm DRAM production |
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May 22, 2006 at 01:34 PM |
 Semiconductor Manufacturing International Corp is believed to have selected Aviza Technology's new single wafer atomic layer deposition (ALD) system, called Celsior for use in Fab4 for the production of DDR2 DRAM for one of its two memory customers, Qimonda and Elpida. Aviza stated in a press release that "China's leading integrated circuit (IC) foundry," had been shipped the system recently.
"ALD is a critical technology to help achieve continued scaling of devices and meet stringent deposition challenges posed by 90-nm and below device structures," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "We believe that Celsior offers our customers significant productivity and cost of ownership (CoO) advantages for single wafer ALD manufacturing. Additionally, this order marks Aviza's continued penetration in the rapidly growing Chinese market."
The Celsior tool is part of previous joint development partnership with Trikon Technologies that has now been acquired by Aviza. The platform incorporates a new process chamber that is claimed to reduce chemical consumption and widen the process window. Trikon's software used on its CVD, PVD and etch tools has also been integrated into the platform.
Qimonda had been developing ALD for DRAM capacitor applications for many years and was the first to fabricate fully functional DRAM chips using Al2O3 as the dielectric in high aspect ratio deep trench capacitors. Genus, an early ALD equipment supplier now a division of Aixtron, had been closely working with Infineon, now Qimonda on the capacitor development. SMIC is a foundry partner of Qimonda and is starting to ramp DDR2 DRAM devices for the company at the 90nm node.
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