Richard Woodling, USFilter, Sunnyvale, CA, USA

ABSTRACT

The CMP solids are concentrated by the ceramic microfilter; a diafiltration system has been developed to remove copper from these solids. Laboratory trials of the crossflow filtration process were conducted, using ceramic membranes with pore sizes of 0.2 and 0.02 microns. Tests were performed on a pilot system, including a marathon test where the system operated on process-generated wastewater. Full-scale systems have now been designed and constructed.reated using standard technology, but the high-suspended-solids wastewater from CMP presents a new challenge.